Achieve an eco-friendly wafer production with argon recycling Made in Germany

What are the advantages of an argon recycling system from ReiCat?

Global demand for semiconductors has risen by around 20% in 2021 alone. For power semiconductors, growth is even expected to triple by 2030. To counteract the impact of existing supply bottlenecks, the European share of global semiconductor production is to be increased.

The manufacture of a large number of products depends on a reliable supply chain for semiconductors. In addition to the electronics industry, the mechanical engineering and automotive sectors as well as the manufacture of important medical devices are affected. The great importance for all European industries goes hand in hand with this.

Silicon wafers are the most important component of semiconductors. In the production of silicon ingots, a distinction is made between monocrystalline and polycrystalline ingots. The wafer production process therefore requires large quantities of argon. Usually, the used process gas is emitted into the atmosphere.

The recovery of argon therefore not only enables enormous cost savings to be made. At the same time, the issue of environmental protection is taken into account: the reduction of the CO2 footprint goes hand in hand with this. Central gas supply systems, including central argon recycling systems, are state of the art in industrial production.

What makes an argon recycling system from ReiCat so special?

The ReiCat system, which is patented or for which further patents are pending, works with two adsorbers. While one adsorber is in operation, the second adsorber is in regeneration. The cycle time is 24 hours. Overall, we are talking about an operating time of > 98%.

After the contaminated process gas has been collected, oil and silicone dust are removed. Carbon monoxide, moisture and oxygen are eliminated by catalytic gas purification. The system works with a fully automatic control and thus offers maximum safety. Carbon dioxide and moisture are separated in the subsequent dryer. This process is also fully automatic and virtually loss-free. In the final step – cryogenic purification- nitrogen is eliminated if necessary. Cryogenic argon from the existing storage tanks, which are also available as a back-up, is used for cooling.

At the outlet of the recycling process, the system has integrated online analytics for nitrogen, oxygen, moisture and hydrogen in order to monitor and guarantee a gas quality of > 5.0 (99.999 %).

Features and benefits of the ReiCat argon recycling maintenance and operating concept

  • All rotating equipment is redundant to ensure an uninterrupted gas supply during maintenance work.
  • Redundant filter stations in series for an uninterrupted gas supply.
  • All other components such as column, reactor, adsorber and valves are designed for 10 years of uninterrupted operation.
  • Online control via internet 24 hours/day.
  • Online support and process optimization via teamviewer®.
  • Automatic switchover to liquid backup supply (argon tank).
  • Highest availability > 98 %.

The ReiCat argon recycling system is characterized by its long service life and extreme reliability. It offers an argon recovery rate of more than 90 %. Its redundancy provides a continuous gas supply, operates fully automatically with 24/7 remote data monitoring and delivers a gas quality of > 5.0 (> 99.999 %).

The advantages are obvious: while protecting the environment and reducing the CO2 footprint, direct savings in operating costs are achieved within short payback periods. No further words are needed.

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Argon recycling